ENCS 6300 - Micro- and Nano-fabrication and Characterization Techniques (3)

This course presents the fundamental principles and techniques used in fabricating micro- and nano-scale structures and devices including lithography, oxidation, diffusion, ion implantation, and methods of film deposition and etching. Further, an overview of the characterization of materials and micro-/nano-scale structures, measurement techniques, and packaging will also be covered. Future trends and challenges in micro-/nano-device manufacturing will also be discussed.